The processor industry-backed company developing extreme
ultraviolet lithography chip-making equipment has demonstrated its
first prototype.

The machine etches circuits on a wafer of silicon. The microscopic
‘wiring’ is 0.01 micron wide – just 5.6 per cent of the width of the
circuits in today’s top-end 0.18 micron CPUs.

That, researchers reckon, will allow Intel, AMD, IBM, Motorola and
co. make chips that run up to 10GHz and up by 2005. The Register